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aip.orgtrue10.1063/1.49321352015-09-28Discharge current modes of high power impulse magnetron sputtering
10.1063/1.4932135http://dx.doi.org/10.1063/1.4932135
doi:10.1063/1.4932135Discharge current modes of high power impulse magnetron sputteringZhongzhen WuShu XiaoZhengyong MaSuihan CuiShunping JiXiubo TianRicky K. Y. FuPaul K. ChuFeng Pan
2015-09-28trueaip.org10.1063/1.4932135
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